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Photoresist Dispensing Pump PDS-105R
- Type:Pneumatic Pump
- CAS No:
- Qty in 20' FCL:
- Min. Order:
- Packaging:
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Specification
Max. discharge capacity
5.0 mL/shot
Discharge speed
0.1 to 4.0 mL/sec
Suction speed
0.1 to 3.0 mL/sec
Max. discharge pressure
0.15 MPa
Repeatability
±0.3 % or below (F.S.)
Main materials
PFA, PTFE, PCTFE, Kalrezr 3
Max. allowable viscosity
200 mPa·s
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High accuracy
Repeatability of ±0.3%(F.S.) is obtained thanks to a stepping motor drive design.
Compact size
260mm in height (330mm for our existing pumps)50mm in width (60mm for our existing pumps)
Saving of Resist
The use of a high-torque stepper motor as the drive source results in a consistent discharge volume, unimpeded by filter clogging or viscosity change. A repeatable accuracy (0.3%) of discharge is maintained.
Contamination-free
Optimized tubephragm design eliminates the possibility of wear particle generation from sliding parts and the possibility of clotting that may occur in dead spaces.